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X-ray photoelectron spectroscopy (XPS) is an analytical technique used to study the elemental composition, chemical state, and electronic structure of the surface of materials. The main components of an XPS instrument include an X-ray source, an ultra-high vacuum (UHV) chamber, a sample holder, an electron energy analyzer, and a detector. The X-ray source, _____ ______ __________ ________ _________ _____.
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