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Micro Electro Mechanical Systems (MEMS) and Nano Electro Mechanical Systems (NEMS) are advanced technologies that integrate mechanical elements, sensors, actuators, and electronic components on a very small scale using microfabrication techniques. MEMS operate at the micrometer scale, typically ranging from a few micrometers to millimeters, whereas NEMS are an extension of MEMS that function at the nanometer scale. Both systems combine electrical and mechanical ______ _______ _______ ___ _____ ________ _______.
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